Course Title : Introduction to the Design and Implementation of Micro-Systems

Code 10V201
Course Year Master and Doctor Course
Term 2nd term
Class day & Period Fri 5th
Location C3-Lecture room 1 or 3
Credits 2
Restriction No Restriction
Lecture Form(s) Lecture and Pactice
Language English
Instructor O. Tabata,T. Tsuchiya,R. Yokokawa

Course Description

This is a joint lecture with Hong Kong University of Science and Technology (HKUST). A team consists of two students from each University work together to fullfill the assignment (design a microsystem) through paper survey, analysis,design, and presentation. A student can acquire not only the basic knowledge of a microsystem, but also comprehensive ability of English such as technical knowledge in English, skill for team work, and communication.


Presentation, Assignments, and Achievement

Course Goals

Acquire the knowledge and skill to design and analyze a microsystem.

Course Topics

Theme Class number of times Description
Tutorial on microsystem CAD software 3 Master CAD program for microsystem design and analysis which will be utilized to accomplish an assignment.
Lecture and Task Introduction 2 Learn basic knowledge necessary to design a microsystem/MEMS(Micro Electromechical Systems) utilizing microfabrication technology.
Design and analysis work 3 Analyze and design a microsystem by communicating with a team member of HKUST.
Presentation I 2 The designed device and its analyzed results is presented in detail by team in English.
Evatuation of device 3 Evaluate the fabricated microsystem.
Presentation II 2 The measured results and comparison between the analyzed results of the fabricated microsystem is presented by team in English.




Students are required to take the 10G203 course Micro Process and Material Engineering provided in 1st term.

Independent Study Outside of Class

Web Sites

Additional Information

The student of this class is required to register to the course 10G205 Microsystem Engineering provided at Friday 4th so as to be able to take consecutive classes at Friday 4th and 5th. Those who want to take this course have to take training course for CAD in advance. Those students who want to take this course has to contact Prof. Tabata ( by the end of 1st term.