Course Title : Micro/Nano Scale Material Engineering

Code 10Z101
Course Year Master and Doctor Course
Term 1st term
Class day & Period 3, 4, 5, 6 September
Location C3-Lecture Room 3
Credits 2
Restriction No Restriction
Lecture Form(s) Intensive Lecture
Language English

Course Description

This class lectures specific mechanical properties and behavior of micro to nano scale materials, underlying mechanism of those properties and behavior and characterization method. Furthermore, techniques of measurements, analysis and structural design of biomaterial such as protein and DNA which are expected to be utilized as micro nano scale materials are lectured.


The evaluation will be based on the reports given in each lecture. (All reports submission is mandatory.)

Course Goals

Educate engineers and researchers with fundamental knowledge on specific mechanical properties and behavior of micro to nano scale materials. They can promote industrial application of micro and nano materials based on the deep understanding about how specific mechanical properties and behavior of micro to nano scale materials dominate performance, reliability and lifetime of MEMS (Micro Electromechanical Systems), microsystems and micro scale components.

Course Topics

Theme Class number of times Description
Outline 1 In this lecture, application examples of micro and nano scale material on devices and importance of mechanical properties and its behavior on device characteristics are described. (Tabata)
Fracture and fatigue mechanism of materials in the micro- and nano- meter scale 4 We explain fundamentals on the fracture and fatigue mechanism of materials in the micro- and nano-meter scale. At first, the characteristic properties of deformation and fracture in small components such as thin films, wires, dots etc. are discussed in terms of the solid mechanics. Focus is put on the interface strength of dissimilar materials as well including the effect of fatigue, creep and environment. Then, we explain the characteristics and mechanisms of “size effects” on the strength of micro- and nano-materials. As a representative example of materials with microscale structures, properties of composite materials are lectured. Characterization of microscopic components such as fibers and matrices are explained from the view points of the difference from bulk materials. Testing methods and properties of fiber/matrix interface are described. The relationship between the deformation and fracture of microscopic components and those of macroscopic composite materials are explained including the underlying mechanism. Explanation is also made to anisotropy of elastic properties and strength. (Hirakata, Sumigawa, Hojo)
Mechanical properties of Silicon 1 Silicon, one of the most widely used materrials in micro/nano devices, is used not only a semiconductor material but also a mechanical material because of its sperior mechcanical properties. In this lecture, the properties of silicon, such as physical, electrical, mechanical, electro-mechanical properties, will be presented in the view point of a mechanical structural material. Especially the lecture will focus on the elastic properties, piezoresistive effect, and fracture/fatigue properties of silicon, indespensable for designing micro/nano-devices. (Tsuchiya)
Characterization of micro nano material 1 In this class, first I will lecture the evaluation method for the mechanical properties of micro and nano-scale materials used for MEMS and semiconductor devices. Several representative experimental techniques for micro and nano mechanical testing will be presented and explained. Then I will lecture representative functional materials, such as shape memory alloy films and self-propagating exothermic foils, and lecture regarding the possibility of their application to MEMS. (Namazu)
Piezoresistive effect of micro and nano material 2 In this theme, we will study the fundamental concepts of electronic-state theory and band structures to represent behavior of electrons in materials, and will discuss the electromechanical properties of materials based on the electronic-state theory. In particular, the principle and features of the piezoresistive effect, the change in the electrical resistivity due to mechanical stresses and strains, will be derived from the band structures of materials. The mechanisms of scale dependence of piezoresistivity in nanoscale materials such as silicon, carbon nanotube, and graphene will be also discussed. (Nakamura)
Bio/Nano material (1) 2 In tissue adaptation, regeneration and stem cell differentiation in tissue morphogenesis, cellular functional activities such as cell migration and division are regulated by complex mechano-chemical couplings at molecular level. To understand such a hierarchical dynamics from nanoscopic molecular events to microscopic cellular dynamics, we will discuss analysis of the molecular and cellular mechanical behaviors as bio-nano materials by integrating experiments, mathematical modeling and computer simulations. (Adachi, Inoue)
Bio/Nano material (2) 1 Cells are well regulated their fates and functions by extracellular microenvironments, consisted with chemical/physical cues and cell-cell interaction at a nano/micro-meter scale. This lecture provides an insight of design methods of biomaterials and their applications to recapitulate extracellular microenvironments. (Kamei)
Bio/Nano material (3) 1 Motor proteins are nano-scale actuators in vivo. Their active functions can be reconstructed in vitro to be utilized as a driving source of micro/nano systems. This lecture introduces fundamentals of their mechanical properties and molecular design methods. (Yokokawa)
Bio/Nano material (4) 1 This lecture describes DNA nanotechnology to construct nanoscale structures using DNA as a structural material. Fundamental knowledge, design methodology and application of DNA origami technique are focused. (Kim)
Feedback 1



Biomaterial: Bionano material: Mechanics of Motor Proteins & the Cytoskeleton, Jonathon Howard, Sinauer Associates (January 2001)


Independent Study Outside of Class

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Additional Information

This lecture is provided as a part of NIP (Nanotech Innovation Professional) course of the Nanotech Career-up Alliance(Nanotech CUPAL)project.