Course Title : Vacuum Electronic Engineering 1

Code 60420
Course Year 3rd year
Term 1st term
Class day & Period
Credits 2
Lecture Form(s) Lecture
Instructor Yasuhito Gotoh

Course Description

Fundamentals on behavior of charged particle beams (electron and ion beams) in vacuum, and also fundamentals on control of charged particle beams are given; the lecture includes nature of electrons and ions, generation of electrons, electron optics, and interaction of charged particle beams with solids.


Grading will be done with the result of the term-end examination.

Course Goals

The goal of the course is to understand physical basis of the phenomena related to charged particle beams, through a study of generation of charged particles, behavior in electromagnetic fields, and interaction of charged particles with solids.

Course Topics

Theme Class number of times Description
General concepts of vacuum electronic engineering 1 Concepts of electron and ion beams are given, and the advantages of these beams in various engineering are described. Finally, current status of the application of charged particle beams are given.
Formation of electron beam 4 Concept of work function which is important for electron emission from solids, and some methods to extract electrons from solid to vacuum are described.
Transport and handling of charged particle beam 5 Electron optics (electrostatic lens, magnetic lens, acceleration and deceleration), which is important to control the shape and energy of charged particles is given. Energy analyzer and mass analyzer are also explained.
Interaction of charged particles with solids 5 Fundamentals on interaction between the charged particles and the gas or solid are described, and application of the interaction will be given.


Zyunzo Ishikawa: Science and Technology of Charged Particle Beams, CORONA PUBLISHING CO., LTD. (2001)



Knowledge on electromagnetics, mechanics, and solids are necessary.

Web Sites

Additional Information

Bring your calculator, because tiny exercise will be in the class.